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发明公开
CN108169290A 半导体传感器及沙林气体或者沙林模拟剂气体的定量检测方法 有权

半导体传感器及沙林气体或者沙林模拟剂气体的定量检测方法
摘要：
本发明提供一种半导体传感器，包括敏感材料层，所述敏感材料层包括氧化铟，所述半导体传感器用于定量检测沙林气体或沙林模拟剂气体。本发明还提供一种沙林气体或沙林模拟剂气体的定量检测方法，包括提供所述的任意一种半导体传感器；将所述半导体传感器的敏感材料层暴露在被检测的沙林气体或者沙林模拟剂气体氛围中，加热所述半导体传感器，获取所述半导体传感器在所述被检测的沙林气体或者沙林模拟剂气体氛围中的第一响应值；以及根据获取的所述第一响应值计算所述被检测的沙林气体或者沙林模拟剂气体的浓度。
摘要（英）：

The invention provides a semiconductor sensor, which comprises a sensitive material layer that includes indium oxide. The semiconductor sensor is used for quantitative determination of a sarin gas ora sarin simulation agent gas. The invention further provides a quantitative determination method for a sarin gas or a sarin simulation agent gas. The method comprises providing any kind of a semiconductor sensor; exposing the sensitive material layer of the semiconductor sensor to an atmosphere of a to-be-detected sarin gas or sarin simulation agent gas, heating the semiconductor sensor, and obtaining a first response value of the semiconductor sensor in the to-be-detected sarin gas or sarin simulation agent gas; and calculating the concentration of the to-be-detected sarin gas or sarin simulation agent gas according to the obtained first response value.

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