The present invention provides a nozzle for substrate analysis with which it becomes possible to conduct analysis reliably without causing leakage of analyzing liquid even if a substrate having highlyhydrophilic properties is swept with the analyzing liquid. The present invention provides a nozzle for substrate analysis, the nozzle being constituted of a duplex tube consisting of a nozzle body that ejects and sucks analyzing liquid and an outer tube disposed at an outer circumference of the nozzle body so as to surround the analyzing liquid used for sweeping, and the nozzle including a discharge means in which a space between the nozzle body and the outer tube serves as a gas discharge path, the nozzle being characterized in that a gas blowing tube for blowing inert gas toward the distalend of the nozzle body in a direction substantially parallel to the substrate surface is disposed on the outer circumferential side at the distal end of the outer tube on the opposite side of the sweeping direction of the nozzle.