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发明公开
CN108352354A 具有沉积表面特征结构的基板支撑组件 有权

具有沉积表面特征结构的基板支撑组件
摘要：
一种制造静电卡盘的方法，包括抛光静电卡盘的陶瓷主体的表面，以产生抛光表面，并将陶瓷涂层沉积到所述陶瓷主体的所述抛光表面上，以产生经涂布的陶瓷主体。所述方法进一步包括在所述经涂布的陶瓷主体之上设置掩模，所述掩模包括多个椭圆形孔，并通过所述掩模的所述多个椭圆形孔沉积陶瓷材料，以在所述经涂布的陶瓷主体上形成多个椭圆形台面，其中所述多个椭圆形台面具有圆边。然后从所述经涂布的陶瓷主体移除所述掩模，并抛光所述多个椭圆形台面。
摘要（英）：

A method of manufacturing an electrostatic chuck includes polishing a surface of a ceramic body of the electrostatic chuck to produce a polished surface and depositing a ceramic coating onto the polished surface of the ceramic body to produce a coated ceramic body. The method further includes disposing a mask over the coated ceramic coating, the mask comprising a plurality of elliptical holes and depositing a ceramic material through the plurality of elliptical holes of the mask to form a plurality of elliptical mesas on the coated ceramic body, wherein the plurality of elliptical mesas have rounded edges. The mask is then removed from the coated ceramic body and the plurality of elliptical mesas are polished.

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