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发明公开
CN108428607A 具有控温功能的离子源及其工作方法 审中-实审

具有控温功能的离子源及其工作方法
摘要：
本发明提供了一种具有控温功能的离子源及其工作方法，所述离子源包括高压电极；气体管道，所述气体管道具有依次排列的内径较大段、过渡段和内径较小段，所述内径较大段的一端固定在所述第一承载件上；所述高压电极设置在所述内径较小段的远离所述内径较大段的一侧；加热件，所述加热件设置在所述内径较小段内；测温部件，所述测温部件检测所述内径较小段内气体的温度；输送单元，所述输送单元将气体输送到所述过渡段和内径较小段的连接处的外侧。本发明具有结构简单、升温快、降温快等优点。
摘要（英）：

The invention provides an ion source with a temperature control function and an operating method thereof. The ion source comprises a high voltage electrode, a gas pipeline, a heating member, a temperature measuring component and a conveying unit, wherein the gas pipeline has a large inner diameter section, a transition section and a small inner diameter section which are arranged in sequence, oneend of the large inner diameter section is fixed on a first load-bearing member; the high voltage electrode is arranged at the side, which is away from the large inner diameter section, of the small inner diameter section; the heating member is arranged in the small inner diameter section; the temperature measuring component detects the temperature of a gas in the small inner diameter section; andthe conveying unit conveys the gas to the outer side of the junction of the transition section and the small inner diameter section. The ion source has the advantages of simple structure, fast heating, fast cooling and the like.

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