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发明公开
CN108540105A 射频谐振器结构 审中-实审 转让

射频谐振器结构
摘要：
本发明公开的射频谐振器结构，包括压电层、以及压电层上下表面分别配置的一定数量的顶部叉指电极和底部叉指电极；压电层上表面位于相邻顶部叉指电极之间的位置均设有沿顶部叉指电极长度方向的沟槽；同时，压电层下表面位于相邻底部叉指电极之间的位置均设有沿底部叉指电极长度方向的沟槽。本发明通过在相邻叉指电极之间的压电层设置沿着叉指电极长度方向的沟槽，来显著消除谐振器的寄生模式，并提升谐振器的机电耦合系数；且易实施，实施成本低。
摘要（英）：

A radio frequency resonator structure disclosed by the invention includes a piezoelectric layer, and a certain amount of top interdigital electrodes and bottom interdigital electrodes respectively configured on the upper and lower surfaces of the piezoelectric layer, wherein troughs along the length direction of the top interdigital electrodes are respectively disposed at the positions between adjacent top interdigital electrodes on the upper surface of the piezoelectric layer; and at the same time, troughs along the length direction of the bottom interdigital electrodes are respectively disposed at the positions between adjacent bottom interdigital electrodes on the lower surface of the piezoelectric layer. By disposing troughs along the length direction of the interdigital electrodes onthe piezoelectric layer between adjacent interdigital electrodes, the invention obviously eliminates the parasitic mode of the resonator and improves the electromechanical coupling factor of the resonator, and is easy to implement and low in implementation cost.

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