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发明公开
CN108627147A 传感器元件控制装置、物理量传感器及其故障诊断方法 审中-实审

传感器元件控制装置、物理量传感器及其故障诊断方法
摘要：
传感器元件控制装置、物理量传感器及其故障诊断方法。本发明提供一种传感器元件控制装置，即使驱动振幅电平变化，也能够在降低对物理量的检测精度产生的影响的同时进行故障诊断。能够与具有驱动部和检测部的传感器元件连接的传感器元件控制装置具有：驱动电路，其向所述驱动部输出驱动信号；检测电路，其根据从所述检测部输出的信号生成检测信号；诊断信号生成电路，其生成具有失调频率的诊断信号，该失调频率是所述驱动部进行振动的频率即驱动频率与所述检测部进行振动的频率即检测频率之差的频率；以及故障诊断电路，其根据在所述驱动信号中叠加有所述诊断信号时从所述检测部输出的信号进行故障诊断。
摘要（英）：

A sensor element control device which is connectable to a sensor element including a drive unit and a detection unit, includes a drive circuit that outputs a drive signal to the drive unit; a detection circuit that generates a detection signal based on a signal output from the detection unit; a diagnostic signal generation circuit that generates a diagnostic signal having a frequency component corresponding to a detuning frequency which is a difference frequency between a drive frequency which is a frequency at which the drive unit vibrates and a detection frequency which is a frequency at which the detection unit vibrates; and a fault diagnosis circuit that performs fault diagnosis based on a signal output from the detection unit when the diagnostic signal is superimposed on the drive signal.

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