利索-全球专利检索

  1. Login
  2. Sign Up
Invention Publication
CN108696811A MEMS声学换能器元件和制造MEMS声学换能器元件的方法 有权

MEMS声学换能器元件和制造MEMS声学换能器元件的方法
Abstract:
本公开涉及一种MEMS声学换能器元件(100)以及一种用于制造这样的MEMS声学换能器元件(100)的方法，其中，所述方法还包括提供第一衬底(200)，其中所述第一衬底(200)具有第一衬底侧(201)、对置的第二衬底侧(202)和布置在所述第一衬底侧(201)上的膜层(203)。另外的方法步骤包括：从所述第二衬底侧(202)起，在对置于所述膜层(203)的第一面部段(221)中实施第一蚀刻，直到第一深度(d1)，另外的方法步骤包括：从所述第二衬底侧(202)起，在大于所述第一面部段(221)并且包括所述第一面部段(221)的第二面部段(222)中实施第二蚀刻，以便在所述第一面部段(221)中暴露所述膜层(203)并且为所述膜层(203)产生背部容积。
Abstract(English):

The invention relates to a MEMS sound transducer element (100) and a method for producing the MEMS sound transducer element (100). The method for producing a MEMS sound transducer element (100) includes the step of providing a first substrate (200). The first substrate (200) has a first substrate side (201), an opposite second substrate side (202) and a membrane layer (203) arranged on the first substrate side (201). A further method step includes performing a first etching from the second substrate side (202) in a first surface section (221) that is situated opposite the membrane layer (203),as far as a first depth (d1). A further method step includes performing a second etching of the first substrate from the second substrate side (202) in a second surface section (222) in order to expose the membrane layer (203) in the first surface section (221) and to produce a back volume for the membrane layer (203), where the second surface section (222) is larger than the first surface section (221) and includes the first surface section (221).

Public/Granted literature
Patent Agency Ranking
0/0