The present invention discloses a minuteness electric spark servo scanning processing parameter optimization method and system. The method comprises the steps of: obtaining discharge energy, obtainingtheoretical upper limit values of an open circuit state tool electrode returning speed and a short circuit state tool electrode speed of a servo control discharge gap according to the maximum discharge gap, the minimum discharge gap, the tool electrode advance and retreat system response delay time and a parameter value of a tool electrode axial loss speed; taking the minimum tool electrode end portion lateral loss and the optimized processing precision as an optimal target, and obtaining a theoretical lower limit value of the servo scanning speed according to the open circuit state tool electrode returning speed and the parameter mentioned above; or taking the integrated optimization and refinement of the three-dimensional servo scanning processing precision and efficiency to obtain thetheoretical lower limit value. The method can avoid the bad condition of inter-electrode short circuit or electrode collision in the minuteness electric spark servo scanning processing to facilitate reduction of the minuteness tool electrode end portion loss and improve the normal discharge rate, processing efficiency and processing precision.