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发明公开
CN109358474A 一种用于激光直写曝光机气动门的控制装置及控制方法 有权

一种用于激光直写曝光机气动门的控制装置及控制方法
摘要：
本发明公开了一种用于激光直写曝光机气动门的控制装置及控制方法，属于激光直写曝光技术领域，包括A气动门主体、B气动门主体、A控制阀门、B控制阀门、控制装置和供气调节管路；A气动门主体的气路接口与A控制阀门连接，A气动门主体的磁性开关接口与控制装置的DI接口连接；A控制阀门气路接口与供气调节管路输出连接，A控制阀门的控制接口与控制装置的DO接口连接；B气动门主体的气路接口与B控制阀门连接，B气动门主体的磁性开关接口与控制装置的DI接口连接；B控制阀门气路接口与供气调节管路输出连接，B控制阀门的控制接口与控制装置的DO接口连接。本发明可实现气动门稳定平滑控制。
摘要（英）：

The invention discloses a control device and method for a laser direct writing exposure machine pneumatic door, and belongs to the technical field of laser direct writing exposure. The pneumatic doorcomprises a pneumatic door body A, a pneumatic door body B, a control valve A, a control valve B, the control device and a gas supply adjusting pipeline. A gas path interface of the pneumatic door body A is connected with the control valve A. A magnetic switch interface of the pneumatic door body A is connected with a DI interface of the control device. A gas path interface of the control valve Ais connected with output of the gas supply adjusting pipeline. A control interface of the control valve A is connected with a DO interface of the control device. A gas path interface of the pneumaticdoor body B is connected with the control valve B. A magnetic switch interface of the pneumatic door body B is connected with the DI interface of the control device. A gas path interface of the control valve B is connected with the output of the gas supply adjusting pipeline. A control interface of the control valve B is connected with the DO interface of the control device. By means of the control device and method, the stable and smooth control over the pneumatic door can be realized.

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