The invention provides a fluid control device of a micro electro mechanical system. The fluid control device of the micro electro mechanical system is composed of at least one fluid guiding unit. Theat least one fluid guiding unit comprises an inlet plate, a substrate, a resonance film, an actuating film, a piezoelectric film and an outlet plate which are arranged sequentially in a stacked mode.A first chamber is formed between the resonance film and the actuating film, and a second chamber is formed between the actuating film and the outlet plate. When the piezoelectric film drives the actuating film, fluid enters a fluid concentration chamber of the substrate from an inlet opening of the inlet plate and flows through a hollow hole of the resonance film to enter the first chamber, and is introduced into the second chamber by a gap of the actuating film and finally led out by an outlet opening of the outlet plate, and the circulation of the fluid is controlled.