The invention discloses a vibration wave micro-nano capacitive sensor which comprises an outer shell. The outer shell comprises an upper half shell and a lower half shell, and an isolation thin film is fixedly arranged between the upper half shell and the lower half shell. A first chamber is formed by the isolation thin film and the upper half shell, a second chamber is formed by the isolation thin film and the lower half shell, and the size of the first chamber is equal to that of the second chamber. The upper wall of the isolation thin film is plated with a first metal film, the inner wall of the upper half shell is plated with an upper metal film, the first chamber is filled with first gas serves as an electric medium, and a first capacitor is formed. The lower wall of the isolation thin film is plated with a second metal film, the inner wall of the lower half shell is plated with a lower metal film, the second chamber is filled with second gas serving gas an electric medium, and asecond capacitor is formed. According to the vibration wave micro-nano capacitive sensor, the vibration wave characters of a fluid pipeline can be sensitively reflected. A fluid pipeline vibration wave monitor array is provided. Vibration waves of the fluid pipeline are comprehensively monitored through the monitor array, and the singular point in the fluid pipeline is reflected.