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发明公开
CN109637946A 半导体批处理生产设备及半导体批处理系统 有权

半导体批处理生产设备及半导体批处理系统
摘要：
本发明提供一种半导体批处理生产设备及半导体批处理系统。半导体批处理生产设备的晶舟承载器上设置有感应侦测装置，感应侦测装置包括用于感应侦测晶舟承载器的水平状态的水平传感器及感应侦测晶舟承载器的振动状态的振动传感器，其具有安装、拆卸及使用方便、成本低廉、感应侦测灵敏等优点。本发明的半导体批处理生产设备通过感应侦测装置实时感知晶舟承载器的水平状态和振动状态，能够避免在晶舟承载器水平失衡或/和振动异常的情况下仍将晶舟放置于晶舟承载器上，以及在晶舟放置于晶舟承载器的情况下通过监测晶舟承载器而能实时监测晶舟的状态以避免生产事故；批处理系统充分利用半导体制造厂中的现有设施实现对生产过程的有效监控。
摘要（英）：

The invention provides semiconductor batch processing production equipment and a semiconductor batch processing system. A sensing detection device is arranged on a boat loader of the semiconductor batch processing production equipment; the sensing detection device comprises a horizon sensor for sensing and detecting a horizontal state of the boat loader and a vibration sensor for sensing and detecting a vibration state of the boat loader; and the semiconductor batch processing production equipment has the advantages of convenience for installation, disassembling and use, low cost, sensitivityfor sensing and detection and the like. The semiconductor batch processing production equipment provided by the invention senses the horizontal state and the vibration state of the boat loader in realtime by the sensing detection device, can avoid placement of a boat on the boat loader in a case that the boat loader is out of balance in horizon or/and abnormal in vibration, and in a case that theboat is placed on the boat loader, can monitor a state of the boat in real time by monitoring the boat loader so as to avoid a production accident; and the batch processing system sufficiently utilizes existing facilities in a semiconductor manufacturer to implement effective monitoring on the production process.

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