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CN109638624A 一种基于超短脉冲激光的高效率且波长连续可调的极紫外光产生系统 无效 - 驳回

  • 专利标题： 一种基于超短脉冲激光的高效率且波长连续可调的极紫外光产生系统
  • 专利标题（英）： Extreme ultraviolet light generating system with high efficiency and continuously adjustable wavelength based on ultrashort pulse laser
  • 申请号： CN201910066739.5
    申请日： 2019-01-24
  • 公开(公告)号： CN109638624A
    公开(公告)日： 2019-04-16
  • 发明人: 黎遥 , 倪志强 , 聂忠辉 , 涂鉴 , 赵亚飞 , 徐永兵 , 何亮 , 阮学忠
  • 申请人： 南京大学
  • 申请人地址： 江苏省南京市鼓楼区汉口路22号
  • 专利权人： 南京大学
  • 当前专利权人： 南京大学
  • 当前专利权人地址： 江苏省南京市鼓楼区汉口路22号
  • 代理机构： 南京瑞弘专利商标事务所
  • 代理商 陈建和
  • 主分类号： H01S3/109
  • IPC分类号： H01S3/109 ;  H01S3/108
一种基于超短脉冲激光的高效率且波长连续可调的极紫外光产生系统
摘要：
本发明公开了一种基于超短脉冲激光的高效率且波长连续可调的极紫外光产生系统，包括：所述超短脉冲激光器输出的基频光经过光学倍频器或者光学参量放大器进行波长转换，通过高次谐波产生仪将转换后的脉冲激光聚焦在惰性气体上辐射产生高次谐波，通过极紫外光单色仪进行波长选择，最终输出高能量及高光通量的单色极紫外光。本发明稳定性高，信噪比好，采用光学倍频器或光学参量放大器对超短脉冲基频光进行波长转换，并通过分光光栅、反射镜及多维调整结构从高次谐波谱中选择特定光子能量的高次谐波，实现高效率且波长连续可调，产生的高能量及高光通量极紫外光可用于时间分辨及角分辨光电子能谱系统和极紫外光相干衍射成像系统的研究。
摘要（英）：

The invention discloses an extreme ultraviolet light generating system with high efficiency and continuously adjustable wavelength based on an ultrashort pulse laser. The fundamental frequency light outputted by the ultrashort pulse laser passes through an optical frequency multiplier or an optical parametric amplifier for wavelength conversion, converted pulsed laser is focused on inert gas by ahigher harmonic generator to radiate and generate higher harmonics, the wavelength is selected by an extreme ultraviolet monochromator, and finally monochromatic extreme ultraviolet light with high energy and high luminous flux is outputted. The extreme ultraviolet light generating system has the advantages of high stability, good signal-to-noise ratio, the wavelength conversion of an ultrashort pulse fundamental frequency light is carried out by using the optical frequency multiplier or the optical parametric amplifier, the higher harmonics of specific photon energy is selected from a higherharmonic spectrum by using a spectroscopic grating, a mirror and a multi-dimensional adjustment structure, the high efficiency and continuously adjustable wavelength are achieved, the generated high energy and extreme ultraviolet light can be used for the research of a time-resolved and angular-resolved photoelectron spectroscopy system and an extreme ultraviolet coherent diffraction imaging system.

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