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发明公开
CN109781761A 一种扫描电镜下的超高温断裂原位观测装置 审中-实审

一种扫描电镜下的超高温断裂原位观测装置
摘要：
本发明公开了一种扫描电镜下的超高温断裂原位观测装置，包括微型机械加载系统和高温环境模块；其中，微型机械加载系统包括微型电机及传动装置基座，高温模块及传动模块基座，微型力传感器和短距高精度激光位移传感器，以及设置在微型电机及传动装置基座上的微型电机和传动装置；高温环境模块包括设置在高温模块及传动模块基座上的高温加载模块隔热外壳，高温加载模块隔热外壳内用于设置被测试样，且高温加载模块隔热外壳内还设置有用于对被测试样进行超高温加热的加热装置，高温模块及传动模块基座与微型电机及传动装置基座安装在一起，且微型机械加载系统中通过微型电机带动传动装置用于对高温加载模块隔热外壳中的被测试样进行拉伸。
摘要（英）：

The invention discloses an in-situ observation device for ultrahigh-temperature fracture under a scanning electron microscope. The device comprises a micro mechanical loading system and a high-temperature environment module, wherein the micro mechanical loading system comprises a micro motor and transmission device base, a high-temperature module and transmission module base, a micro force sensor,a short-distance high-precision laser displacement sensor, as well as a micro motor and a transmission device which are arranged on the micro motor and transmission device base; the high-temperatureenvironment module comprises a high-temperature loading module heat insulation shell arranged on the high-temperature module and transmission module base, a tested sample is arranged in the high-temperature loading module heat insulation shell, a heating device for carrying out ultra-high temperature heating on the tested sample is also arranged in the high-temperature loading module heat insulation shell; the high-temperature module and transmission module base and the micro motor and transmission device base are installed together, and the transmission device is driven by the micro motor inthe micro mechanical loading system to stretch the tested sample in the high-temperature loading module heat insulation shell.

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