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发明公开
CN110146370A 一种微小力的加载测量装置和方法 有权

一种微小力的加载测量装置和方法
摘要：
本发明提供了一种微小力的加载测量装置和方法，包括压电组件、移动组件、第一加载模块、第二加载模块、第一测量模块和处理模块；所述第一加载模块用于通过所述压电组件的形变向所述移动组件施加机械力，并通过所述机械力带动所述移动组件移动；所述第二加载模块用于向所述移动组件施加静电力，并通过所述静电力带动所述移动组件移动；所述第一测量模块用于测量所述移动组件的位移量；所述处理模块用于根据所述移动组件的位移量得到所述移动组件所承受的力的大小，所述力包括所述机械力、所述静电力以及粘附力，从而实现了机械加载和电加载的耦合测量。
摘要（英）：

The invention provides a micro-force loading measurement device and method. The device comprises a piezoelectric assembly, a moving assembly, a first loading module, a second loading module, a first measurement module and a processing module, wherein the first loading module is used to apply a mechanical force to the moving assembly through deformation of the piezoelectric assembly and drive the moving assembly to move by the mechanical force; the second loading module is used to apply an electrostatic force to the moving assembly and drive the moving assembly to move by the electrostatic force; the first measurement module is used to measure the displacement amount of the moving assembly; and the processing module is used to obtain the size of the force of the moving assembly according tothe displacement amount of the moving assembly. The force comprises the mechanical force, the electrostatic force and an adhesion force, and thus, coupling measurement of mechanical loading and electrical loading is realized.

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