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发明公开
CN110574395A 一种MEMS麦克风 有权 转让

一种MEMS麦克风
摘要：
一种MEMS麦克风，包括由PCB基板(1)和外壳(2)包围形成的封装结构，所述封装结构内设置有MEMS声电芯片(3)，PCB基板(1)对应MEMS声电芯片(3)的位置设置有声孔(11)，该MEMS麦克风还包括过滤器(5)，过滤器(5)嵌入设置在MEMS声电芯片(3)的背孔中，过滤器(5)与PCB基板(1)之间留有横向孔隙，横向孔隙作为MEMS声电芯片采集声音的声音通道。该MEMS麦克风能够防止气流冲击，阻挡动力学颗粒对MEMS麦克风的干扰，同时保持MEMS麦克风的声学性能，降低MEMS麦克风的封装尺寸。
摘要（英）：

A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate (1) and a housing (2), wherein the packaging structure is provided with a MEMS acoustoelectric chip (3) therein, and the PCB substrate (1) is provided with a sound port (11) at a position that is corresponding to the MEMS acoustoelectric chip (3), wherein, the MEMS microphone further comprises a filter (5), wherein the filter (5) is embedded into a back cavity of the MEMS acoustoelectric chip (3), the filter (5) and the PCB substrate (1) have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip (3)to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.

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