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发明公开
CN110670044A 成膜厚度检测装置、检测方法以及蒸镀设备 有权

成膜厚度检测装置、检测方法以及蒸镀设备
摘要：
本发明公开了一种成膜厚度检测装置、检测方法以及蒸镀设备，成膜厚度检测装置包括：晶振片，位于蒸镀源的蒸发侧，并与蒸镀源间隔设置，晶振片能够将晶振片上的成膜厚度信息转化为振动频率信息；导向组件，包括容纳腔以及与容纳腔连通的导向通道，容纳腔容纳晶振片，导向通道具有朝向蒸镀源的导入口，蒸镀源的蒸发材料能够经由导入口在导向通道的导向下到达晶振片成膜，其中，导入口能够在晶振片与蒸镀源之间移动以使导向通道伸缩。本发明提供的成膜厚度检测装置能够准确的对晶振片上的成膜厚度进行检测。
摘要（英）：

The invention discloses a film-forming thickness detection device and detection method and evaporation equipment. The film-forming thickness detection device comprises a crystal oscillator sheet and aguide assembly. The crystal oscillator sheet is located on the evaporation side of an evaporation source, the crystal oscillator sheet and the evaporation source are arranged in a spaced manner, andthe crystal oscillator sheet can convert film-forming thickness information on the crystal oscillator sheet into vibration frequency information. The guide assembly comprises a containing cavity and aguide channel communicating with the containing cavity, the containing cavity contains the crystal oscillator sheet, the guide channel is provided with a guide-in opening facing the evaporation source, and an evaporation material of the evaporation source can pass through the guide-in opening to arrive at the crystal oscillator sheet under guide of the guide channel to form a film. The guide-in opening can move between the crystal oscillator sheet and the evaporation source so that the guide channel can stretch and contract. By means of the film-forming thickness detection device, the film-forming thickness on the crystal oscillator sheet can be detected accurately.

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