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发明公开
CN110931391A 液体输送设备、液体输送及蒸发方法以及半导体制造系统 有权

液体输送设备、液体输送及蒸发方法以及半导体制造系统
摘要：
本公开一些实施例提供一种将液体输送到下游工艺的液体输送设备以及方法。所述液体输送设备可包括配置以保持液体的容器；以及流体连接容器以从容器接收流体以及流体连接下游工艺以输送流体的伸缩管。伸缩管暴露于恒定外界压力，并配置以在伸缩管停止从容器接收流体时，在恒定外界压力下输送流体。在一些实施例中，恒定外界压力为大气压力。所述伸缩管包括可经受压力而变形的材料。所述液体输送设备还包括蒸发器，配置以接收流体并蒸发流体以制造蒸气；以及一或多个化学气相沉积腔室，配置以接收蒸气并保持基板，用以将蒸气的成分沉积在基板上。
摘要（英）：

The present disclosure relates to an apparatus and a method of delivering a liquid to a downstream process. The apparatus can include a vessel configured to retain a liquid, a bellow in fluid communication with the vessel to receive the liquid from the vessel and in fluid communication with the downstream process to deliver the liquid. The bellow can be exposed to a constant external pressure and configured to deliver the liquid under the constant external pressure when the bellow stops receiving the liquid from the vessel. In some embodiments, the constant external pressure is atmospheric pressure. The bellow can include a pressure deformable material. The apparatus can further include a vaporizer configured to receive the liquid and to produce a vapor, one or more chemical vapor deposition chambers configured to receive the vapor and to hold a substrate for deposition of a component of the vapor on a substrate.

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