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发明公开
CN111213226A 相对于对象物使移动体直线移动的装置及方法 审中-实审

相对于对象物使移动体直线移动的装置及方法
摘要：
本发明包括：基体(10)，相对于基板(16)而直线移动，在移动方向上具有空开规定间隔a的第一位置与第二位置；线性标度尺(33)，沿着移动方向以规定间距设有多个刻度；以及各编码器头(31，32)，配置于基体(10)的第一位置、第二位置，检测对于第一位置、第二位置的线性标度尺(33)的第一刻度编号B1(n)、第二刻度编号B2(n)；并且，一面使基体(10)沿着线性标度尺(33)移动，一面逐次利用各编码器头(31、32)来检测第一刻度编号B1(n)、第二刻度编号B2(n)，根据规定间隔a与第一刻度编号B1(n)和第二刻度编号B2(n)之间的标度尺上的距离A(n)的比率，控制基体(10)的移动量。
摘要（英）：

The present invention is provided with: a base (10) which moves linearly relative to a substrate (16) and has a first position and a second position that are spaced apart from each other by a predetermined interval in the movement direction; a linear scale (33) in which a plurality of markings having a predetermined pitch are provided along the movement direction; encoder heads (31, 32) which respectively are disposed at the first and second positions of the base (10) and detect first and second marking numbers B1(n) and B2(n) of the linear scale (33) with respect to the first and second positions, wherein, as the base (10) is moved along the linear scale (33), the first and second marking numbers B1(n) and B2(n) are detected in this order in the respective encoder heads (31, 32), and the movement amount of the base (10) is controlled on the basis of the ratio between the predetermined interval and the distance A(n) between the first marking number B1(n) and the second marking number B2(n) on the scale.

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