The method for checking the surfacial defect makes the polorized light irradiate on the surface of the checked body to determine the parameters (psi and delta) of the elipically polorized light of the reflect light, then makes light irradiate on the same position irradiated by the polorize light to determine the light intensity(I), then the grade and kind of defect are judged. The invented surfacial defect checking apparatus consists of unit for making polorized light irradiate on the checked surface and measuring the above mentioned parameters psi and delta, unit or making light irradiate onthe same position irradiated by polorized light and measuring the light intensity(I) and unit for determining the three diamensional position of pis, delta and I of the above mentioned reflect light into predetermined range and sending out.