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发明公开
CN1460559A 一种基片上材料数量可控的投放方法 有权

一种基片上材料数量可控的投放方法
摘要：
本发明提供一种用于在基片上投放材料的装置和方法。该装置包括一具有投放器的投放系统，以及控制系统，该控制系统适于调节投放在基片上的材料数量。装置还包括一图像俘获系统，其适于获取该投放在基片上材料的图像，一用于分析该图像并测量该投放材料数量的测量系统，以及一校正系统，其适于将校正信号提供给该控制系统以改变投放材料的数量。
摘要（英）：

The present invention provides an apparatus for dispensing material on the substrate and its method. Said apparatus includes a dispensation system with disperser and its control system, and said control system is suitable for regulating quantity of the material dispensed on the substrate. The apparatus also contains an image-capturing system for obtaining image of material dispensed on the substrate, a measurement system for analyzing said image and measuring said dispensed material quantity and a correction system suitable for providing correcting signal for said control system to change thequantity of material to be dispensed.

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