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发明公开
CN1581458A 基板支承用槽棒及使用该槽棒的基板载具 失效 - 权利终止

基板支承用槽棒及使用该槽棒的基板载具
摘要：
本发明公开一种基板支承用槽棒及使用该槽棒的基板载具。该基板支承用槽棒包括一树脂体与一金属棒，该树脂体包括一具有轴向贯穿孔的柱状本体与自该本体一侧以间隔平行突出的多个支承板，该金属棒插设在该本体的贯穿孔内，以增加该槽棒的支承强度，该支承板的末端具有突出部，该突出部用以托持基板。
摘要（英）：

The slot bar includes a resin body and a metal bar. The resin body includes columnar body with an axial through hole and multiple parallel spatial support plates exserted on one side of the said body. a metal bar is inderted into the axial through hole of the columnar body in order to enhance supporting strength of the slot bar. There are nose parts on end parts of the support plates. the nose parts are utilized to support base plate.

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