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发明公开
CN1606099A 一种X射线组合透镜的制作方法 失效 - 权利终止

一种X射线组合透镜的制作方法
摘要：
一种X射线组合透镜的制作方法，包括以下步骤：(A)在经常规清洁处理的衬底(1)上生长一层电铸阴极薄膜(2)；(B)在电铸阴极薄膜(2)上以低转速涂覆第一层AZP4903正性光刻胶，并烘烤固化，烘烤温度为97.5℃至102.5℃，烘烤时间为8至12分钟；(C)在第一层AZP4903正性光刻胶上以低转速涂覆第二层AZP4903正性光刻胶，并烘烤固化，烘烤温度为87.5℃至92.5℃，烘烤时间为18至22分钟；(D)对AZP4903光刻胶进行光刻；(E)对光刻后的样品先烘烤，再显影；(F)对清洗后的样品进行电铸；(G)取出样品，用去离子水清洗；(H)样品去除剩余的光刻胶；(I)将暴露出来的电铸阴极薄膜(2)刻蚀掉，即制成为金属X射线组合透镜。本发明提供一种使成品率高、制作工艺简单、安全性好的X射线组合透镜的制作方法。
摘要（英）：

The invention discloses a method of making X-ray combination lenses which comprises, (1) growing a layer of electroformed cathode thin film onto substrate undergone conventional cleaning processing, (2) coating a first layer of AZP4903 positive photoresisting rubber onto the electroformed cathode thin film with a low rotary speed, roasting for hardening, (3) coating a second layer of AZP4903 positive photoresisting rubber onto the first layer of AZP4903 positive photoresisting rubber with low rotary speed, roasting for hardening, (4) subjecting the AZP4903 photoresisting rubber to photo-etching, (5) subjecting the photo-etched example to baking and developing, (6) electroforming the cleaned sample, (7) cleaning the sample with deionized water, (8) removing residual photoresisting glue from the sample, (9) etching the exposed electroformed cathode thin film.

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