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发明授权
CN1790551B 扫描探针显微镜传感器 失效 - 权利终止

扫描探针显微镜传感器
摘要：
本发明涉及用于扫描探针显微镜的带有悬臂(3)、在悬臂(3)的一端的保持元件(2)和在悬臂(3)的另一端的传感器尖端(4)的SPM传感器(1)，并且涉及用于生产这种传感器的方法。EBD结构(5)直接锚定在传感器尖端(4)的基底内。对EBD结构(5)的锚定用正性接合和非正性接合而发生在处于传感器尖端(4)内的孔(6)内，该孔(6)通过在传感器尖端(4)的基底内进行材料去除而得以创造。在通过光刻构造和随后的蚀刻过程或通过由粒子束而进行材料移除之后，方法设想了通过在传感器尖端的孔内由粒子束产生的材料沉积而创造EBD结构。
摘要（英）：

An SPM sensor ( 1 ) for a scanning probe microscope with a cantilever ( 3 ), a holding element ( 2 ) at one end of the cantilever ( 3 ) and a sensor tip ( 4 ) at the other end of the cantilever ( 3 )and to a method for producing sensors of this type. The EBD structure ( 5 ) is anchored directly in the substrate of the sensor tip ( 4 ). The anchoring of the EBD structure ( 5 ) takes place with positive and nonpositive engagement in a hole ( 6 ) in the sensor tip ( 4 ), which is created by material removal in the substrate of the sensor tip ( 4 ). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.

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