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发明公开
CN1911588A 在硅光电池表面刻槽的方法及装置 失效 - 权利终止

在硅光电池表面刻槽的方法及装置
摘要：
本发明公开了一种在硅光电池的表面进行刻槽的加工方法及装置。该方法采用两束激光分别与加工平面的法线方向对称倾斜角度+θ和－θ，并且使两束激光所在的平面垂直于槽线方向，用聚焦透镜将两束激光聚焦在垂直于槽线方向上，焦点位于硅片表面下方，将加工平面沿着槽线方向平移，两束激光加工形成下宽上窄的线槽。该装置包括激光器、分光器件、全反射镜、聚焦透镜、两维精密工作台。本发明具有能够直接完成硅光电池的刻槽加工任务、成本低、效率高、加工质量容易保证等优点。
摘要（英）：

The present invention discloses method and apparatus for cutting groove in the surface of silicon photocell. Two laser beams inclined symmetrically to the normal line of the processed plane and constituting one plane perpendicular to the groove to be cut are focused with focusing lens onto the groove with the focus being inside the silicon surface, and the processed plane is shifted in the groove direction, so as to form the required groove with wide lower part and narrow upper part. The apparatus includes a laser, a light splitter, total reflectors, a focusing lens and a 2D precise work bench. The present invention has the advantages of low production cost, high efficiency, high production quality, etc.

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