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发明授权
CN1979126B 用于样品分析的方法及设备 失效 - 权利终止

用于样品分析的方法及设备
摘要：
本发明涉及用于分析样品(1)的方法，包括以下步骤：(i)通过安装在悬臂(5)上的至少一个探针(4)的尖端(3)接近所述样品(1)的区域；(ii)从通过安装在所述悬臂(5)上的所述至少一个探针(4)的所述尖端(3)接近的所述区域除去样品材料；以及(iii)传感与步骤(ii)中所述样品材料的去除相关的参数，其中重复步骤(i)到(iii)，以促使除去所述样品(1)的至少一层。
摘要（英）：

A method and apparatus for analysis of a sample. The method includes an accessing operation for accessing a region of the sample via a tip of at least one probe mounted on a cantilever. A removing operation removes a sample material from the region that is accessed by the tip of the at least one probe mounted on the cantilever. A sensing operation senses a parameter associated to the removal of the sample material in the removing operation. The accessing, removing, and sensing operations are repeated to facilitate removal of at least one layer of the sample.

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