The utility model discloses a vacuum heating device relates to and shows technical field, has solved the tray among the prior art owing to preserve under the atmospheric environment and adsorbed a large amount of foreign gases, has caused during once more by the use atmosphere of plating the membrane ring border unusual when absorbing the tray that there is foreign gas to the problem that leads to the reduction of product yield. Vacuum heating device includes: the vacuum chamber is equipped with the heating unit that is used for heating the tray in, the vacuum chamber intercommunication has nitrogen gas generation unit. The utility model provides a vacuum heating device is arranged in showing technical field.