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实用新型
CN208883976U 一种蒸镀装置 有权

一种蒸镀装置
摘要：
本实用新型公开了一种蒸镀装置。该蒸镀装置包括：蒸镀腔室；设置于所述蒸镀腔室内的至少一个腔室组件和与所述至少一个腔室组件分别连接的内衬；至少一个加热装置，设置于与所述至少一个腔室组件分别连接的内衬上，且位于所述内衬远离所述至少一个腔室组件的一侧，以独立控制每一内衬的加热温度和加热时间。本实用新型可以采用至少一个加热装置分别独立控制对应内衬的加热温度和加热时间，使得蒸镀腔室内的内衬上的水气大大减少，有利于减少镀膜材料性能改变，确保了镀膜材料在蒸镀时的良好性状，提高了蒸镀产品的效率和品质。
摘要（英）：

The utility model discloses an evaporation device. The vapor deposition apparatus includes: a vapor deposition chamber; Wherein the at least one chamber assembly is arranged in the evaporation chamber, and the lining is respectively connected with the at least one chamber assembly; And the at least one heating device is arranged on the lining respectively connected with the at least one cavity assembly and is positioned on one side, far away from the at least one cavity assembly, of the lining so as to independently control the heating temperature and the heating time of each lining. Accordingto the utility model, at least one heating device can be adopted to independently control the heating temperature and the heating time of the corresponding lining, so that the moisture on the liningin the evaporation chamber is greatly reduced, the performance change of the coating material is reduced, the good property of the coating material during evaporation is ensured, and the efficiency and the quality of an evaporation product are improved.

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