发明授权
EP0055932B1 Schottky gate electrode for a compound semiconductor device, and method of manufacturing it 失效
用于化合物半导体器件的肖特基门电极及其制造方法

  • 专利标题: Schottky gate electrode for a compound semiconductor device, and method of manufacturing it
  • 专利标题(中): 用于化合物半导体器件的肖特基门电极及其制造方法
  • 申请号: EP81306151.2
    申请日: 1981-12-24
  • 公开(公告)号: EP0055932B1
    公开(公告)日: 1985-09-11
  • 发明人: Yokoyama, Naoki
  • 申请人: FUJITSU LIMITED
  • 申请人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
  • 专利权人: FUJITSU LIMITED
  • 当前专利权人: FUJITSU LIMITED
  • 当前专利权人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
  • 代理机构: Sunderland, James Harry
  • 优先权: JP189544/80 19801230
  • 主分类号: H01L29/64
  • IPC分类号: H01L29/64 H01L21/28
Schottky gate electrode for a compound semiconductor device, and method of manufacturing it
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