发明公开
- 专利标题: Dispenser for ion source
- 专利标题(中): 离子源的分配器
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申请号: EP82302817申请日: 1982-06-01
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公开(公告)号: EP0066474A3公开(公告)日: 1983-06-22
- 发明人: Prewett, Philip Doughty , Jefferies, Derek Kirk , Pashley, Neil Arthur , Cockhill, Thomas Derek
- 申请人: DUBILIER SCIENTIFIC LIMITED
- 专利权人: DUBILIER SCIENTIFIC LIMITED
- 当前专利权人: DUBILIER SCIENTIFIC LIMITED
- 优先权: GB8116841 19810602
- 主分类号: H01J37/08
- IPC分类号: H01J37/08
摘要:
A dispenser for supplying metal vapour to an ion source. The metal is provided in a capsule 17 which may be broken to release the metal by turning knob 16 which causes a capsule housing 12 to move to the right, thus causing the capsule to break against a piston member 21. The piston member 21 communicates with a conduit 3 which in turn communicates with the associated ion source, partly shown under reference 2. A heating mantle 29 is provided to vapourise the metal in the housing 12 so that it can pass from the dispenser, through conduit 3, to the ion source.
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