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公开(公告)号：EP0066474A3
公开(公告)日：1983-06-22
申请号：EP82302817
申请日：1982-06-01
发明人： Prewett, Philip Doughty , Jefferies, Derek Kirk , Pashley, Neil Arthur , Cockhill, Thomas Derek
IPC分类号： H01J37/08
CPC分类号： H01J27/26
摘要： A dispenser for supplying metal vapour to an ion source. The metal is provided in a capsule 17 which may be broken to release the metal by turning knob 16 which causes a capsule housing 12 to move to the right, thus causing the capsule to break against a piston member 21. The piston member 21 communicates with a conduit 3 which in turn communicates with the associated ion source, partly shown under reference 2. A heating mantle 29 is provided to vapourise the metal in the housing 12 so that it can pass from the dispenser, through conduit 3, to the ion source.
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公开(公告)号：EP0056899A1
公开(公告)日：1982-08-04
申请号：EP81305685.0
申请日：1981-12-02
发明人： Pashley, Neil Arthur
CPC分类号： H01J27/20 , H01J2237/0802 , H01J2237/0807
摘要： A gas ion source in which a high density electric field is established between a first electrode in the form of a hollow needle 5 through which gas to be ionised may pass and a second extractor electrode 9 which has a through-aperture 10 through which the ions flow on their way to a target (not shown).
摘要翻译： 一种气体离子源，其中在要被电离的气体可以通过的空心针5形式的第一电极和具有通孔10的第二提取电极9之间建立高密度电场，通过该离子源离子 流向目标（未显示）。
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公开(公告)号：EP0107320A3
公开(公告)日：1986-11-20
申请号：EP83305358
申请日：1983-09-13
IPC分类号： H01J37/317 , H01J37/05
CPC分类号： H01J37/3007 , H01J37/045 , H01J37/05
摘要： @ A system for incorporation in ion-beam equipment to provide ion species filtering and optional ion beam blanking. The system comprises four magnets 4, 5, 6 and 7 arranged on an axis 1. lnbetween magnets 5 and 6 is arranged a plate 10 having an offaxis aperture 11. The ion beam, shown under reference 2, is caused to converge to a focus on plane 3 where the plate 10 is situated. When the magnets 4-7 are energised, the ion beam is caused to bend in the manner shown in drawing A, the amount of deflection depending upon the charge-to-mass ratio of the ion species within the beam. If constructed correctly, the aperture 11 can thus be arranged to pass only a single ion species, the remainder colliding with and being absorbed by the plate 10. Beam blanking may optionally be achieved by blanking plates 13 which may be used to deflect the ion beam out of the plane of parts A and B of the drawing - this is shown in part D of the drawing where it will be seen that the resultant focal point 17 of the ion beam is displaced away from the aperture 11 so that the whole ion beam is blanked off. Astigmatism introduced into the system may be reduced or eliminated by the use of octopole electrode sets 14 and 15.
摘要翻译： 用于纳入离子束设备以提供离子物质过滤和可选离子束消隐的系统。 该系统具有布置在光轴上的四个磁体。 在两个中心磁体之间布置有具有离轴孔径的板。 使离子束会聚到位于上述板所在的中平面上的焦点。 当磁体通电时，使离子束弯曲一定量，这取决于束内离子种类的电荷质量比。 如果正确构造，则孔可以被布置成仅通过单个离子种类，剩余物与板碰撞并被板吸收。 光束消隐可以可选地通过冲裁板来实现，该板可以用于使离子束偏转的方式使离子束的所得焦点从孔径移开，使得整个离子束被消隐。 引入到系统中的散光可以通过使用八极电极组来减少或消除。
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公开(公告)号：EP0107320A2
公开(公告)日：1984-05-02
申请号：EP83305358.0
申请日：1983-09-13
IPC分类号： H01J37/317 , H01J37/05
CPC分类号： H01J37/3007 , H01J37/045 , H01J37/05
摘要： @ A system for incorporation in ion-beam equipment to provide ion species filtering and optional ion beam blanking. The system comprises four magnets 4, 5, 6 and 7 arranged on an axis 1. lnbetween magnets 5 and 6 is arranged a plate 10 having an offaxis aperture 11. The ion beam, shown under reference 2, is caused to converge to a focus on plane 3 where the plate 10 is situated. When the magnets 4-7 are energised, the ion beam is caused to bend in the manner shown in drawing A, the amount of deflection depending upon the charge-to-mass ratio of the ion species within the beam. If constructed correctly, the aperture 11 can thus be arranged to pass only a single ion species, the remainder colliding with and being absorbed by the plate 10. Beam blanking may optionally be achieved by blanking plates 13 which may be used to deflect the ion beam out of the plane of parts A and B of the drawing - this is shown in part D of the drawing where it will be seen that the resultant focal point 17 of the ion beam is displaced away from the aperture 11 so that the whole ion beam is blanked off. Astigmatism introduced into the system may be reduced or eliminated by the use of octopole electrode sets 14 and 15.
摘要翻译： 用于纳入离子束设备以提供离子物质过滤和可选离子束消隐的系统。 该系统具有布置在光轴上的四个磁体。 在两个中心磁体之间布置有具有离轴孔径的板。 使离子束会聚到位于上述板所在的中平面上的焦点。 当磁体通电时，使离子束弯曲一定量，这取决于束内离子种类的电荷质量比。 如果正确构造，则孔可以被布置成仅通过单个离子种类，剩余物与板碰撞并被板吸收。 光束消隐可以可选地通过冲裁板来实现，该板可以用于使离子束偏转的方式使离子束的所得焦点从孔径移开，使得整个离子束被消隐。 引入到系统中的散光可以通过使用八极电极组来减少或消除。
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