发明公开
EP0127176A3 Integrated pressure sensor 失效
集成压力传感器

Integrated pressure sensor
摘要:
In an integrated pressure sensor, a silicon chip (10) for pressure detection and a substrate (22) for supporting the silicon chip are made of the same material, the silicon chip (10) has a thin diaphragm portion (14) and a peripheral fixed portion (12) thicker than the diaphragm portion (14), and the silicon chip (10) is bonded to the substrate (22) through a thin insulating film (20).
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