发明公开
EP0176684A2 Process for forming a master mold for optical storage disks
失效
Verfahren zur Herstellung einer Formenmatrizefüroptische Speicherplatten。
- 专利标题： Process for forming a master mold for optical storage disks
- 专利标题（中）： Verfahren zur Herstellung einer Formenmatrizefüroptische Speicherplatten。
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申请号： EP85109185.0申请日： 1985-07-23
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公开(公告)号： EP0176684A2公开(公告)日： 1986-04-09
- 发明人: Bergendahl, Albert Stephen , Cade, Paul Edmand , Luecke, Francis Stephen , Petersen, Kurt Edward , Gonnella, Norman Thomas
- 申请人： International Business Machines Corporation
- 申请人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构： Vekemans, André (BE)
- 优先权： US647088 19840904
- 主分类号： G11B7/26
- IPC分类号： G11B7/26 ; G11B23/00
摘要：
A process for forming a master mold for optical storage disks includes coating a semiconductor wafer (7) with a thermally grown oxide (8) which is then coated with a photoresist (9). The photoresist is exposed to a laser beam to form a data pattern and developed. The developed oxide is etched and the photoresist stripped to provide a semiconductor master mold.
公开/授权文献
- EP0176684B1 Process for forming a master mold for optical storage disks 公开/授权日：1990-09-26
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