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公开(公告)号：EP0176684A3
公开(公告)日：1988-05-04
申请号：EP85109185
申请日：1985-07-23
发明人： Bergendahl, Albert Stephen , Cade, Paul Edmand , Luecke, Francis Stephen , Petersen, Kurt Edward , Gonnella, Norman Thomas
CPC分类号： G11B23/0057 , G11B7/261
摘要： A process for forming a master mold for optical storage disks includes coating a semiconductor wafer (7) with a thermally grown oxide (8) which is then coated with a photoresist (9). The photoresist is exposed to a laser beam to form a data pattern and developed. The developed oxide is etched and the photoresist stripped to provide a semiconductor master mold.
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公开(公告)号：EP0176684B1
公开(公告)日：1990-09-26
申请号：EP85109185.0
申请日：1985-07-23
发明人： Bergendahl, Albert Stephen , Cade, Paul Edmand , Luecke, Francis Stephen , Petersen, Kurt Edward , Gonnella, Norman Thomas
CPC分类号： G11B23/0057 , G11B7/261
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3.发明公开Process for forming a master mold for optical storage disks 失效Verfahren zur Herstellung einer Formenmatrizefüroptische Speicherplatten。
公开(公告)号：EP0176684A2
公开(公告)日：1986-04-09
申请号：EP85109185.0
申请日：1985-07-23
发明人： Bergendahl, Albert Stephen , Cade, Paul Edmand , Luecke, Francis Stephen , Petersen, Kurt Edward , Gonnella, Norman Thomas
CPC分类号： G11B23/0057 , G11B7/261
摘要： A process for forming a master mold for optical storage disks includes coating a semiconductor wafer (7) with a thermally grown oxide (8) which is then coated with a photoresist (9). The photoresist is exposed to a laser beam to form a data pattern and developed. The developed oxide is etched and the photoresist stripped to provide a semiconductor master mold.
摘要翻译： 用于形成用于光学存储盘的母模的方法包括用热生长氧化物（8）涂覆半导体晶片（7），然后用光致抗蚀剂（9）涂覆。 将光致抗蚀剂暴露于激光束以形成数据图案并显影。 蚀刻开发的氧化物并剥离光致抗蚀剂以提供半导体母模，
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