发明公开
- 专利标题: Projection optical system for use in precise copy
- 专利标题(中): 投影光学系统用于精密复印
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申请号: EP87103472.4申请日: 1987-03-11
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公开(公告)号: EP0237041A3公开(公告)日: 1989-05-03
- 发明人: Satoh, Takeo , Araki, Nobuhiro , Kawata, Koichi , Nomura, Noboru , Ueno, Atushi , Yoshida, Shotaro
- 申请人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 申请人地址: 1006, Oaza Kadoma Kadoma-shi, Osaka-fu, 571 JP
- 专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: 1006, Oaza Kadoma Kadoma-shi, Osaka-fu, 571 JP
- 代理机构: Patentanwälte Leinweber & Zimmermann
- 优先权: JP54051/86 19860312; JP159055/86 19860707
- 主分类号: G02B17/08
- IPC分类号: G02B17/08
摘要:
A projection optical system for use in a precise copy which uses a pair of catadioptric optical systems (I and II) consisting of convex mirrors (2, 6), concave mirrors (3, 5), and phase correction members (4, 4') is shown. Two catadioptric optical systems (I and II) commonly use an entrance pupil (E, EP) on a coaxis and are coupled so as to respectively face the phase correction members (4, 4'). Each of the concave mirrors (3, 5) has an opening at the center. Each of the convex mirrors (2, 6) has no opening in one embodiment but has an opening portion at the center in another embodiment.
公开/授权文献
- EP0237041B1 Projection optical system for use in precise copy 公开/授权日:1993-08-18
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |