发明公开
- 专利标题： Electrical resistant composition, substrates coated therewith, and process for preparing such
- 专利标题（中）： 耐磨电组合物涂覆的基材和它们的制备方法。
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申请号： EP87106699.9申请日： 1987-05-08
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公开(公告)号： EP0247413A1公开(公告)日： 1987-12-02
- 发明人: Cuomo, Jerome John , Dibble, Eric Paul , Levine, Solomon Leon
- 申请人： International Business Machines Corporation
- 申请人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构： Kreidler, Eva-Maria, Dr. rer. nat.
- 优先权： US866554 19860523
- 主分类号： C23C14/06
- IPC分类号： C23C14/06 ; H01H1/02
摘要：
A composition of a metallic compound represented by the formula MT, and G is provided by sputtering an M x G 100-x target. M is a metal selected from the group of titanium, hafnium, zirconium, and mixtures thereof. T is selected from the group of N, C, and mixtures thereof. G is a metal selected from the group of gold, platinum, and palladium. X is an integer from about 65 to about 95. Also provided are substrates coated with the composition and process for depositing the composition on substrates.
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