发明公开
EP0329103A2 Process for manufacturing thin film of high-Tc superconducting oxide
失效
Verfahren zur Herstellung vondünnenSchichten aus Hochtemperatur-Supraleiteroxyd。
- 专利标题： Process for manufacturing thin film of high-Tc superconducting oxide
- 专利标题（中）： Verfahren zur Herstellung vondünnenSchichten aus Hochtemperatur-Supraleiteroxyd。
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申请号： EP89102584.3申请日： 1989-02-15
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公开(公告)号： EP0329103A2公开(公告)日： 1989-08-23
- 发明人: Kurosawa, Hideyuki c/o KABUSHIKI KAISHA RIKEN , Hirai, Toshio , Yamane, Hisanori
- 申请人： KABUSHIKI KAISHA RIKEN , Research Development Corporation of Japan , Hirai, Toshio , Yamane, Hisanori
- 申请人地址： 13-5, Kudan-Kita 1-chome Chiyoda-ku Tokyo 102 JP
- 专利权人： KABUSHIKI KAISHA RIKEN,Research Development Corporation of Japan,Hirai, Toshio,Yamane, Hisanori
- 当前专利权人： KABUSHIKI KAISHA RIKEN,Research Development Corporation of Japan,Hirai, Toshio,Yamane, Hisanori
- 当前专利权人地址： 13-5, Kudan-Kita 1-chome Chiyoda-ku Tokyo 102 JP
- 代理机构： Bühling, Gerhard, Dipl.-Chem.
- 优先权： JP32594/88 19880217; JP49411/88 19880302; JP148942/88 19880616
- 主分类号： H01L39/24
- IPC分类号： H01L39/24 ; C04B35/50 ; C23C16/40
摘要：
A process for manufacturing a thin film of high-T c superconducting oxide by means of chemical vapor deposition technique using vaporizing sources for the elements constituting the superconducting oxide and a carrier gas with oxygen, which process comprises depositing a layer of an oxide composition on a substrate under a chemical deposition condition of a temperature below 1,000°C and a reduced pressure from vaporizing sources for the elements including at least barium, yttrium and copper and subjecting the so deposited layer to epitaxial crystal growth to form an oxide thin film having a chemical composition of Ba₂YCu₃O 7-y , wherein said vaporizing sources consist each of an organic complex compound, such as β-diketone complex.
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