Invention Publication
EP0346271A1 Microelectronic Field Ionizer and Method of Fabricating the Same
失效
Nach der Mikroelektronik aufgebauter Feldionisator und Verfahren zur Herstellung desselben。
- Patent Title: Microelectronic Field Ionizer and Method of Fabricating the Same
- Patent Title (中): Nach der Mikroelektronik aufgebauter Feldionisator und Verfahren zur Herstellung desselben。
-
Application No.: EP89730139.6Application Date: 1989-06-07
-
Publication No.: EP0346271A1Publication Date: 1989-12-13
- Inventor: Spindt, Charles A.
- Applicant: SRI INTERNATIONAL
- Applicant Address: 333 Ravenswood Avenue Menlo Park, California 94025-3493 US
- Assignee: SRI INTERNATIONAL
- Current Assignee: SRI INTERNATIONAL
- Current Assignee Address: 333 Ravenswood Avenue Menlo Park, California 94025-3493 US
- Agency: UEXKÜLL & STOLBERG
- Priority: US205191 19880610
- Main IPC: H01J27/26
- IPC: H01J27/26 ; H01J9/14 ; H01L21/32
Abstract:
A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counterelectrode layer of material is provided on the microelectronic substrate, in registration with the gas outlets.
Information query
