发明公开
- 专利标题： Alignment device
- 专利标题（中）： 对准设备
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申请号： EP89114147.5申请日： 1989-08-01
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公开(公告)号： EP0366880A3公开(公告)日： 1991-05-29
- 发明人: Cipolla, Thomas Mario , Horton, Raymond Robert , Murphy, Philip , Palmer, Michael Jon
- 申请人： International Business Machines Corporation
- 申请人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构： Kirchhof, Norbert, Ing. grad.
- 优先权： US264713 19881031
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H05K13/00
摘要：
Apparatus for automatically adjusting the orientation of a first surface (104) of a first body (108) to be against a second surface (106) of a second body when said first surface is pressed against said second surface. The apparatus includes a means for movably mounting the first body to a support which permits rotation of the first surface so that when the first surface is pressed against the second surface, the first surface rotates with respect to the support resulting in the first surface being against the second surface.
公开/授权文献
- EP0366880B1 Alignment device 公开/授权日：1995-01-04
信息查询
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