There is provided a vibration wave driven motor comprising: a number of diffraction gratings provided for either a rotating member or a vibrating member along a rotating direction; and an optical system for irradiating a light flux from a coherent light source to the diffraction gratings through a plurality of optical paths, for interfering a plurality of diffracted lights generated, and for allowing the resultant interference light to be detected by photo sensitive devices, wherein by detecting the outputs of the photo sensitive devices, the high accurate speed control is accomplished.