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公开(公告)号：EP0369331A3
公开(公告)日：1990-07-18
申请号：EP89120821.7
申请日：1989-11-09
发明人： Nishimura, Tetsuharu , Kiyomatsu, Satoshi , Hirata, Noritsugu , Yamada, Yasuhiro , Kishino, Hitoshi
IPC分类号： G01P3/36
摘要： There is provided a vibration wave driven motor comprising: a number of diffraction gratings provided for either a rotating member or a vibrating member along a rotating direction; and an optical system for irradiating a light flux from a coherent light source to the diffraction gratings through a plurality of optical paths, for interfering a plurality of diffracted lights generated, and for allowing the resultant interference light to be detected by photo sensitive devices, wherein by detecting the outputs of the photo sensitive devices, the high accurate speed control is accomplished.
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公开(公告)号：EP0369331A2
公开(公告)日：1990-05-23
申请号：EP89120821.7
申请日：1989-11-09
发明人： Nishimura, Tetsuharu , Kiyomatsu, Satoshi , Hirata, Noritsugu , Yamada, Yasuhiro , Kishino, Hitoshi
IPC分类号： G01P3/36
摘要： There is provided a vibration wave driven motor comprising: a number of diffraction gratings provided for either a rotating member or a vibrating member along a rotating direction; and an optical system for irradiating a light flux from a coherent light source to the diffraction gratings through a plurality of optical paths, for interfering a plurality of diffracted lights generated, and for allowing the resultant interference light to be detected by photo sensitive devices, wherein by detecting the outputs of the photo sensitive devices, the high accurate speed control is accomplished.
摘要翻译： 提供了一种振动波驱动电动机，包括：沿旋转方向为旋转构件或振动构件设置的多个衍射光栅; 以及用于通过多个光路将来自相干光源的光束照射到衍射光栅的光学系统，用于干扰所产生的多个衍射光，并且允许所得到的干涉光被光敏器件检测，其中 通过检测感光装置的输出，可以实现高精度的速度控制。
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