An apparatus for forming a predetermined circuit pattern on a circuit substrate (1) by using a µ-STM write head, the µ-STM write head comprising a write head substrate (31) having a flat surface, a plurality of micro chip electrodes (6) formed upright on the flat surface of the write head substrate (31) and consti­tuting a µ-STM, a level of a distal end of each of the chip electrodes (6) being set to be constant, and scanning means for scanning the micro chip electrodes on the circuit substrate by moving the micro chip electro­des and the circuit substrate relative to each other in two-dimensional directions.