Atomic force microscope
    1.
    发明公开
    Atomic force microscope 失效
    原子力显微镜

    公开(公告)号:EP0422548A3

    公开(公告)日:1991-07-31

    申请号:EP90119243.5

    申请日:1990-10-08

    IPC分类号: G01B7/34

    CPC分类号: G01Q20/02 Y10S977/87

    摘要: A light beam (L) from a light source (12) is divided into two beams (Lr, Lt) by a polarized beam splitter (16). The beam (Lr) is reflected by a mirror (20), is converted into a P-polarized beam by a 1/4 λ plate (18), passes through the beam splitter (16), is reflected by prisms (22, 24), passes through a polarized beam splitter (26), is reflected by a mirror (30), is converted into an S-polarized beam by a 1/4 λ plate (28), is reflected by the beam splitter (26), and is finally incident on a detector (34). The beam (Lt) is converted into an S-polarized beam by a 1/2 λ plate (36), is reflected by a polarized beam splitter (38), is reflected by the upper face of a cantilever (44) sup­porting a probe (46), passes through a polarized beam splitter (52), is reflected twice in a prism (54), passes through the beam splitter (38), is reflected again by the cantilever (44), is converted into an S-­polarized beam by a 1/4 λ plate (40), is reflected by the beam splitter (52), is converted into a P-polarized beam by a 1/2 λ plate (56), passes through the beam splitter (26), and is finally incident on the detector (34). The detector (34) outputs the displacement of the cantilever (44) from the optical path difference of the beams Lr and Lt.

    Tunnel current data storage apparatus having separate lever bodies
    2.
    发明公开
    Tunnel current data storage apparatus having separate lever bodies 失效
    Tunnelstromdatenaufzeichnungsgerätmit getrennten Hebelanordnungen。

    公开(公告)号:EP0381113A2

    公开(公告)日:1990-08-08

    申请号:EP90101723.6

    申请日:1990-01-29

    IPC分类号: G11B9/00

    摘要: A data storage apparatus includes a first lever body (10) having a piezoelectric driving section, and a second lever body (20) which is disposed to separate from and to be perpendicular to the first lever body (10), and has a piezoelectric driving section. A recording medium (22) is formed on a portion of the second lever body (20), and records desired data. A plurality of probes (12₁ to 12 n ) are disposed on a portion of the first lever body (10) to oppose the recording medium (22) at a predetermined interval, and detect a change in state at predetermined positions on the recording medium (22) as a change in tunnel current or a change in three-dimensional pattern. A voltage applying circuit (39, 40) alternately applies predeter­mined voltages to the piezoelectric driving sections of the first and second lever bodies (10, 20) to separately drive the plurality of probes (12₁ to 12 n ) in different directions, thereby three-dimensionally scanning the recording medium (22).

    摘要翻译: 数据存储装置包括具有压电驱动部分的第一杠杆体(10)和与第一杠杆体(10)分离并垂直于第一杠杆体(10)的第二杠杆体(20),并具有压电驱动 部分。 记录介质(22)形成在第二杠杆体(20)的一部分上,并记录所需数据。 多个探针(121〜12n)设置在第一杆体(10)的与预定间隔相对的记录介质(22)的一部分上,并检测记录介质(22)上的预定位置的状态变化 )作为隧道电流的变化或三维图案的变化。 电压施加电路(39,40)交替地对第一和第二杠杆体(10,20)的压电驱动部分施加预定的电压,以分别驱动多个探针(121至12n)在不同方向上,从而三维地 扫描记录介质(22)。

    Atomic force microscope
    9.
    发明公开
    Atomic force microscope 失效
    Atomkraftmikroskop。

    公开(公告)号:EP0422548A2

    公开(公告)日:1991-04-17

    申请号:EP90119243.5

    申请日:1990-10-08

    IPC分类号: G01B7/34

    CPC分类号: G01Q20/02 Y10S977/87

    摘要: A light beam (L) from a light source (12) is divided into two beams (Lr, Lt) by a polarized beam splitter (16). The beam (Lr) is reflected by a mirror (20), is converted into a P-polarized beam by a 1/4 λ plate (18), passes through the beam splitter (16), is reflected by prisms (22, 24), passes through a polarized beam splitter (26), is reflected by a mirror (30), is converted into an S-polarized beam by a 1/4 λ plate (28), is reflected by the beam splitter (26), and is finally incident on a detector (34). The beam (Lt) is converted into an S-polarized beam by a 1/2 λ plate (36), is reflected by a polarized beam splitter (38), is reflected by the upper face of a cantilever (44) sup­porting a probe (46), passes through a polarized beam splitter (52), is reflected twice in a prism (54), passes through the beam splitter (38), is reflected again by the cantilever (44), is converted into an S-­polarized beam by a 1/4 λ plate (40), is reflected by the beam splitter (52), is converted into a P-polarized beam by a 1/2 λ plate (56), passes through the beam splitter (26), and is finally incident on the detector (34). The detector (34) outputs the displacement of the cantilever (44) from the optical path difference of the beams Lr and Lt.

    摘要翻译: 来自光源(12)的光束(L)被偏振分束器(16)分成两束(Lr,Lt)。 光束(Lr)由反射镜(20)反射,由1/4λ板(18)转换成P偏振光束,通过分束器(16),被棱镜(22,24)反射 )通过偏振分束器(26)被反射镜(30)反射,被1/4λ板(28)转换成S偏振光束,被分束器(26)反射, 并最终入射到检测器(34)上。 通过1/2λ板(36)将光束(Lt)转换成S偏振光束,被偏振分束器(38)反射,被支撑探针的悬臂(44)的上表面反射 (46)通过偏振分束器(52),在棱镜(54)中反射两次,穿过分束器(38),被悬臂(44)再次反射,被转换成S偏振 通过1/4λ板(40)的光束被分束器(52)反射,通过1/2λ板(56)转换成P偏振光束,通过分束器(26), 并最终入射到检测器(34)上。 检测器(34)从梁Lr和Lt的光程差输出悬臂(44)的位移。