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EP0404221A2 Method of and apparatus for measuring lattice constant ratio 失效
Verfahren und Vorrichtung zur Messung desGitterkonstantenverhältnisses。

  • 专利标题: Method of and apparatus for measuring lattice constant ratio
  • 专利标题(中): Verfahren und Vorrichtung zur Messung desGitterkonstantenverhältnisses。
  • 申请号: EP90201498.4
    申请日: 1990-06-11
  • 公开(公告)号: EP0404221A2
    公开(公告)日: 1990-12-27
  • 发明人: Maruyama, Hiromu
  • 申请人: Philips Electronics N.V.
  • 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
  • 专利权人: Philips Electronics N.V.
  • 当前专利权人: Philips Electronics N.V.
  • 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
  • 代理机构: Bakker, Hendrik
  • 优先权: JP152208/89 19890616
  • 主分类号: G01N23/207
  • IPC分类号: G01N23/207 G01N23/20
Method of and apparatus for measuring lattice constant ratio
摘要:
The invention discloses a method and an apparatus for measuring lattice spacings in particular of a single crystal during the grow thereof by vapour deposition whilst located in a heating furnace.
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