发明公开
EP0404221A2 Method of and apparatus for measuring lattice constant ratio
失效
Verfahren und Vorrichtung zur Messung desGitterkonstantenverhältnisses。
- 专利标题: Method of and apparatus for measuring lattice constant ratio
- 专利标题(中): Verfahren und Vorrichtung zur Messung desGitterkonstantenverhältnisses。
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申请号: EP90201498.4申请日: 1990-06-11
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公开(公告)号: EP0404221A2公开(公告)日: 1990-12-27
- 发明人: Maruyama, Hiromu
- 申请人: Philips Electronics N.V.
- 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人: Philips Electronics N.V.
- 当前专利权人: Philips Electronics N.V.
- 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构: Bakker, Hendrik
- 优先权: JP152208/89 19890616
- 主分类号: G01N23/207
- IPC分类号: G01N23/207 ; G01N23/20
摘要:
The invention discloses a method and an apparatus for measuring lattice spacings in particular of a single crystal during the grow thereof by vapour deposition whilst located in a heating furnace.
公开/授权文献
- EP0404221A3 Method of and apparatus for measuring lattice constant ratio 公开/授权日:1991-07-24
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