发明公开
- 专利标题: Read-only semiconductor memory device
- 专利标题(中): 努尔 - Lese酒店 - Halbleiterspeicheranordnung。
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申请号: EP91104009.5申请日: 1991-03-15
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公开(公告)号: EP0447976A1公开(公告)日: 1991-09-25
- 发明人: Takase, Shinsuke, c/o Intellectual Property Div. , Tanaka, Yutaka, c/o Intellectual Property Div. , Hashimoto, Hisashi, c/o Intellectual Property Div.
- 申请人: KABUSHIKI KAISHA TOSHIBA , TOSHIBA MICRO-ELECTRONICS CORPORATION
- 申请人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 专利权人: KABUSHIKI KAISHA TOSHIBA,TOSHIBA MICRO-ELECTRONICS CORPORATION
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA,TOSHIBA MICRO-ELECTRONICS CORPORATION
- 当前专利权人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 代理机构: Lehn, Werner, Dipl.-Ing.
- 优先权: JP64112/90 19900316
- 主分类号: H01L27/112
- IPC分类号: H01L27/112
摘要:
A source (13), a drain (14), and a channel (15) are formed in an element region of a semiconductor substrate (11). A gate electrode (16) is formed above the channel (15). An insulating oxide film (18) is deposited on the entire surface of the resultant structure. Contact holes (19) and (20) are formed to bring the source (13) and drain (14) of each memory cell transistor into contact with each other. A wiring layer of a first aluminum layer is formed on the insulating oxide film including inner portions of the contact holes (19) and (20). The wiring layer includes a wiring layer (21A) for connecting adjacent memory cell transistors and a wiring layer (21B) for short-circuiting the source (13) and drain (14) to operate a memory cell transistor in the same manner as a depletion type transistor does.
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