摘要:
A source (13), a drain (14), and a channel (15) are formed in an element region of a semiconductor substrate (11). A gate electrode (16) is formed above the channel (15). An insulating oxide film (18) is deposited on the entire surface of the resultant structure. Contact holes (19) and (20) are formed to bring the source (13) and drain (14) of each memory cell transistor into contact with each other. A wiring layer of a first aluminum layer is formed on the insulating oxide film including inner portions of the contact holes (19) and (20). The wiring layer includes a wiring layer (21A) for connecting adjacent memory cell transistors and a wiring layer (21B) for short-circuiting the source (13) and drain (14) to operate a memory cell transistor in the same manner as a depletion type transistor does.
摘要:
Memory cells (21), which serve as basic cells, are arranged in a matrix pattern. The memory cells (21) are each provided with a word line (W′) which is integral with the gate electrode of a switch element (SW) and which is formed of polysilicon. A metallic interconnection layer (M) is arranged above the word line (W′) and is applied with substantially the same potential as the word line (W′). The metallic interconnection layer (M) and the word line (W′) are connected together via through-holes (23A). The through-holes (23A) are formed in through-hole cells (23), which also serve as basic cells. The through-hole cells (23) and the memory cells (21) are arranged such that the number of rows of the former and the number of rows of the latter are in the ratio of one to at least two.
摘要:
Memory cells (21), which serve as basic cells, are arranged in a matrix pattern. The memory cells (21) are each provided with a word line (W′) which is integral with the gate electrode of a switch element (SW) and which is formed of polysilicon. A metallic interconnection layer (M) is arranged above the word line (W′) and is applied with substantially the same potential as the word line (W′). The metallic interconnection layer (M) and the word line (W′) are connected together via through-holes (23A). The through-holes (23A) are formed in through-hole cells (23), which also serve as basic cells. The through-hole cells (23) and the memory cells (21) are arranged such that the number of rows of the former and the number of rows of the latter are in the ratio of one to at least two.