发明公开
EP0469895A2 X-ray transmitting window and method of mounting the same
失效
Fenster和Verfahren zu seiner Einrichtung的Röntgenstrahlenübertragendes。
- 专利标题： X-ray transmitting window and method of mounting the same
- 专利标题（中）： Fenster和Verfahren zu seiner Einrichtung的Röntgenstrahlenübertragendes。
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申请号： EP91307038.9申请日： 1991-07-31
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公开(公告)号： EP0469895A2公开(公告)日： 1992-02-05
- 发明人: Watanabe Yutaka , Uzawa, Shunichi , Fukuda, Yasuaki , Mizusawa, Nobutoshi , Ebinuma, Ryuichi , Amemiya, Mitsuaki
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP202530/90 19900801; JP167059/91 19910708
- 主分类号： H01J35/18
- IPC分类号： H01J35/18 ; H01J47/00 ; H01J5/18 ; G21K1/00
摘要：
An X-ray transmitting window for use in X-ray lithography, for allowing transmission therethrough of X-rays from a vacuum ambience to a different ambience, is disclosed. The window includes an X-ray transmitting film; and a gasket material gas-tightly provided on at least one of opposite surfaces in a peripheral portion of the X-ray transmitting film, the gasket material having a Brinell hardness smaller than that of the X-ray transmitting film. The formed X-ray transmitting window is able to be sandwiched and fastened between a pair of flanges gas-tightly.
公开/授权文献
- EP0469895B1 X-ray transmitting window and method of mounting the same 公开/授权日：1995-12-06
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