发明公开
EP0485202A2 Use of STM-like system to measure node voltage on integrated circuits
失效
Anwendung eine STM-artigen Systems zur Messung der Knotenspannung in integrierten Schaltungen。
- 专利标题： Use of STM-like system to measure node voltage on integrated circuits
- 专利标题（中）： Anwendung eine STM-artigen Systems zur Messung der Knotenspannung in integrierten Schaltungen。
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申请号： EP91310287.7申请日： 1991-11-06
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公开(公告)号： EP0485202A2公开(公告)日： 1992-05-13
- 发明人: Aton, Thomas J. , Moslehi, Mehrdad M. , Matthews, Robert T. , Davis, Cecil J.
- 申请人： TEXAS INSTRUMENTS INCORPORATED
- 申请人地址： 13500 North Central Expressway Dallas Texas 75265 US
- 专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址： 13500 North Central Expressway Dallas Texas 75265 US
- 代理机构： Blanco White, Henry Nicholas
- 优先权： US609987 19901106; US634842 19901227
- 主分类号： G01R31/302
- IPC分类号： G01R31/302 ; G01R31/28
摘要：
A method and apparatus for measuring node voltage on an integrated circuit is disclosed herein. A sensing needle 10, wich is connected to supply voltage 20, is positioned directly above node 12 on integrated circuit 14. Tunneling or field emission current 30 is produced in sensing needle 10 due to the difference in potential between sensing needle 10 and node 12. Supply voltage 20 is adjusted to set current 30 to an initial value. When the voltage on node 12 changes, the current 30 will also try to change. When a change in current 30 is detected, a signal 28 is generated to adjust supply voltage 20 such that current 30 returns to its initial value. Consequently, the change in supply voltage 20 mirrors the change in voltage on node 12.
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