A method and device for cleaning, in which an object to be cleaned is washed or rinsed with cleaning or rinsing agent constituted mainly of non-aqueous solvent and hydrophilic solvent and is dried after removing cleaning or rinsing agent sticking to the surface of said object with the application of cleansing agent constituted mainly of perfluorocarbon or vapor thereof. In another way, the object, after washed with aqueous cleaning agent or in water, is cleaned and dried with the application of cleaning agent constituted mainly of perfluorocarbon or vapor thereof. Cleansing agent constituted mainly of perfluorocarbon or vapor thereof is also applicable to cleaning and rinsing of an object to be cleaned.