发明公开
EP0500234A3 Method for making diaphragm-based sensors and apparatus constructed therewith
失效
制造基于膜片的传感器的方法及其构造的装置
- 专利标题： Method for making diaphragm-based sensors and apparatus constructed therewith
- 专利标题（中）： 制造基于膜片的传感器的方法及其构造的装置
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申请号： EP92300996.3申请日： 1992-02-06
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公开(公告)号： EP0500234A3公开(公告)日： 1993-03-24
- 发明人: Hocker, Benjamin G. , Ikinwande, Akintunde I. , Burns, David W. , Horning, Robert D. , Mirza, Amir R. , Saathoff, Diedrich J. , Stratton, Thomas G. , Carney, James K.
- 申请人： HONEYWELL INC.
- 申请人地址： Honeywell Plaza Minneapolis Minnesota 55408 US
- 专利权人： HONEYWELL INC.
- 当前专利权人： HONEYWELL INC.
- 当前专利权人地址： Honeywell Plaza Minneapolis Minnesota 55408 US
- 代理机构： Fox-Male, Nicholas Vincent Humbert
- 优先权： US652148 19910207
- 主分类号： G01L9/02
- IPC分类号： G01L9/02 ; G01L9/06
摘要：
A diaphragm transducer 201 is manufactured by forming cavities in a diaphragm layer which are backfilled with a material readily removed by etching. The diaphragm layer is bonded to a silicon wafer. Access passages are provided to enable removal of the backfill material. The transducer 201 is incorporated in a three-wafer capacitive sensor 4 bonded to a pressure tube 5 with pressure ports 204 and 205 leading to access pressure ports 206.
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